The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Aug. 15, 2017
Applicant:
Y-sensors Ltd., Misgav, IL;
Inventor:
Yishay Netzer, Yuvalim, IL;
Assignee:
Y-SENSORS LTD., Misgav, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); G01C 19/5769 (2012.01);
U.S. Cl.
CPC ...
B81B 7/0096 (2013.01); G01C 19/5769 (2013.01); B81B 2201/0242 (2013.01);
Abstract
A temperature-stabilized MEMS device in which heat is generated by ohmic heating as an electric current passes through at least part of one of the structural layers of the device. Various implementation options are disclosed in which the heating occurs in a device layer () of the device, either in an outer frame () or within the area of an active structure (), or where heating occurs within a substrate () or a cover () of the device. One application of particular relevance is a gyroscope device.