The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Sep. 26, 2019
Applicant:
Electronics and Telecommunications Research Institute, Daejeon, KR;
Inventor:
Yark Yeon Kim, Daejeon, KR;
Assignee:
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 7/24 (2006.01); H05H 1/24 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H05H 1/2406 (2013.01); H01J 37/32009 (2013.01); H01J 37/3494 (2013.01); H01J 37/32532 (2013.01); H01J 37/32623 (2013.01); H05H 1/24 (2013.01); H05H 1/46 (2013.01); H05H 2001/2462 (2013.01); H05H 2001/2468 (2013.01);
Abstract
Provided is a plasma generation apparatus including: a housing in which a window is defined at one side in a first direction; a stick type plasma source provided in the housing to generate plasma toward the window; and a driving unit coupled to the plasma source to allow one end of the plasma source to perform a reciprocating movement in a second direction that is a longitudinal direction of the window.