The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Aug. 15, 2016
Applicant:

Oracle International Corporation, Redwood Shores, CA (US);

Inventors:

Saman Saeedi, Redwood City, CA (US);

Frankie Y. Liu, Palo Alto, CA (US);

Yue Zhang, San Mateo, CA (US);

Suwen Yang, Mountain View, CA (US);

Assignee:

Oracle International Corporation, Redwood Shores, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 7/00 (2006.01); H01L 35/12 (2006.01); H01L 35/32 (2006.01); G01K 7/02 (2006.01); G01K 7/42 (2006.01);
U.S. Cl.
CPC ...
H01L 35/12 (2013.01); G01K 7/028 (2013.01); G01K 7/42 (2013.01); H01L 35/32 (2013.01);
Abstract

The disclosed embodiments relate to the design of a temperature sensor, which is integrated into a semiconductor chip. This temperature sensor comprises an electro-thermal filter (ETF) integrated onto the semiconductor chip, wherein the ETF comprises: a heater; a thermopile, and a heat-transmission medium that couples the heater to the thermopile, wherein the heat-transmission medium comprises a polysilicon layer sandwiched between silicon dioxide layers. It also comprises a measurement circuit that measures a transfer function through the ETF to determine a temperature reading for the temperature sensor.


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