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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10672640 B1

PDFFull Text
Date of Patent:
Jun. 02, 2020

Filed:

Aug. 09, 2018

Semiconductor processing apparatus and semiconductor processing method

Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventor:

Junichi Igarashi, Nagoya, JP;

Assignee:

TOSHIBA MEMORY CORPORATION, Minato-ku, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Kimberly N Rizkallah

Assistant Examiner:

Alexander Belousov

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/687 (2006.01); B05B 13/02 (2006.01); B05C 11/02 (2006.01); B05C 11/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68742 (2013.01); B05B 13/0228 (2013.01); B05C 11/023 (2013.01); B05C 11/1002 (2013.01); H01L 21/6708 (2013.01); H01L 21/67051 (2013.01); H01L 21/67259 (2013.01); H01L 21/68728 (2013.01); H01L 21/68792 (2013.01);
Abstract

A semiconductor processing apparatus according to the present embodiment is provided with a stage capable of placing a semiconductor substrate thereon and of rotating the semiconductor substrate. A plurality of holders are provided on the stage, to hold an edge of the semiconductor substrate. A plurality of sensors are provided to the plurality of holders, respectively, to detect the edge of the semiconductor substrate. An elevator mechanism is capable of changing heights of the holders. A controller controls the elevator mechanism to change the heights of the holders so that the plurality of sensors detect the edge of the semiconductor substrate.

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Igarashi, Junichi. (2020). Semiconductor processing apparatus and semiconductor processing method (U.S. Patent No. 10672640). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10672640

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