The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Dec. 03, 2018
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Edwin den Hartog Besselink, Amsterdam, NL;
Adriaan Garssen, Doorn, NL;
Marco Dirkmaat, Amersfoort, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 23/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67353 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67379 (2013.01); H01L 23/32 (2013.01);
Abstract
The invention relates to a cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate in an interior space accessible from a front end of the cassette. The cassette holder assembly may have a base plate for receiving the cassette. Two holding members supported by the base plate may be positioning the cassette on the plate in the assembly. The holding members may be substantially identical to each other.