The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Aug. 11, 2016
Atlantic Inertial Systems Limited, Plymouth, Devon, GB;
Kiran Mysore Harish, Plymouth, GB;
Alan Malvern, Plymouth, GB;
Atlantic Inertial Systems Limited, Devon, GB;
Abstract
A capacitive accelerometer comprises: a substantially planar proof mass mounted to a fixed substrate by flexible support legs so as to be linearly moveable in an in-plane sensing direction. The proof mass comprises first and second sets of moveable capacitive electrode fingers. First and second sets of fixed capacitive electrode fingers interdigitates with the first and second sets of moveable electrode fingers respectively. A set of moveable damping fingers extend from the proof mass substantially perpendicular to the sensing direction, laterally spaced in the sensing direction. A set of fixed damping fingers mounted to the fixed substrate interdigitates with the set of moveable damping fingers and comprises an electrical connection to the proof mass so that the interdigitated damping fingers are electrically common. The damping fingers are mounted in a gaseous medium that provides a damping effect.