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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10670554 B1

PDFFull Text
Date of Patent:
Jun. 02, 2020

Filed:

Jul. 13, 2015

Reconfigurable gas sensor architecture with a high sensitivity at low temperatures

Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

S. J. Chey, Mount Kisco, NY (US);

Hendrik F. Hamann, Yorktown Heights, NY (US);

Levente Klein, Tuckahoe, NY (US);

Siyuan Lu, Yorktown Heights, NY (US);

Roland Nagy, Osterhofen, DE;

Assignee:

International Business Machines Corporation, Armonk, NY (US);

Attorneys:

Tutunjian & Bitetto, P.C.

Vazken Alexanian

Primary Examiner:

Brian J Sines

Int. Cl.
CPC ...
G01N 30/96 (2006.01); G01N 7/00 (2006.01); G01N 27/414 (2006.01); G01N 33/00 (2006.01); G01N 27/12 (2006.01); C23C 14/08 (2006.01); C23C 14/14 (2006.01); C23C 14/30 (2006.01); C23C 14/34 (2006.01); G08B 21/16 (2006.01); G08B 29/18 (2006.01); G08B 29/22 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4141 (2013.01); C23C 14/086 (2013.01); C23C 14/14 (2013.01); C23C 14/30 (2013.01); C23C 14/34 (2013.01); G01N 27/123 (2013.01); G01N 27/125 (2013.01); G01N 33/0027 (2013.01); G08B 21/16 (2013.01); G08B 29/185 (2013.01); G08B 29/22 (2013.01); G01N 33/0006 (2013.01); G01N 33/0047 (2013.01);
Abstract

A gas sensing device includes a dielectric substrate, a heater integrated into a first side of the substrate and an insulating dielectric formed over the heater. A gas sensing layer is formed on a second side of the substrate opposite the first side. Contacts are formed on the gas sensing substrate. A noble material is formed on a portion of the gas sensing layer between the contacts to act as an ionizing catalyst such that, upon heating to a temperature, adsorption of a specific gas changes electronic properties of the gas sensing layer to permit detection of the gas.

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