The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Nov. 30, 2016
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventor:
Ashwin Samarao, Sunnyvale, CA (US);
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/127 (2013.01); G01N 27/128 (2013.01);
Abstract
A nanostructured environmental sensor includes a silicon based substrate, a structural base located above the substrate, and a sensor portion suspended above the structural base. A top surface of the sensor portion is formed from nickel oxide using atomic layer deposition. The nanostructured thin film nickel oxide environmental sensor is provided in a housing to form an environmental sensor package for sensing attributes of the environment to which the environmental sensor package is exposed.