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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10670522 B1

PDFFull Text
Date of Patent:
Jun. 02, 2020

Filed:

Jan. 10, 2019

Micro object detection apparatus

Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventor:

Kenya Nakai, Tokyo, JP;

Assignee:

MITSUBISHI ELECTRIC CORPORATION, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

Roy M Punnoose

Int. Cl.
CPC ...
G01N 21/49 (2006.01); G01N 15/06 (2006.01); G01N 21/53 (2006.01); G01N 15/14 (2006.01); G01N 15/02 (2006.01); G01N 21/21 (2006.01); G01N 21/03 (2006.01); G01N 21/05 (2006.01); G01N 15/00 (2006.01);
U.S. Cl.
CPC ...
G01N 21/49 (2013.01); G01N 15/0205 (2013.01); G01N 15/0211 (2013.01); G01N 15/06 (2013.01); G01N 15/1434 (2013.01); G01N 15/1459 (2013.01); G01N 21/21 (2013.01); G01N 21/53 (2013.01); G01N 21/0303 (2013.01); G01N 21/05 (2013.01); G01N 2015/0046 (2013.01); G01N 2015/0053 (2013.01); G01N 2015/0687 (2013.01); G01N 2015/0693 (2013.01); G01N 2015/1452 (2013.01); G01N 2015/1486 (2013.01); G01N 2015/1488 (2013.01); G01N 2015/1493 (2013.01);
Abstract

A micro object detection apparatus () includes an optical system (). The first optical system () includes a first reflection region (), a second reflection region (), and a light reception element (). The first reflection region () has an ellipsoidal shape, and reflects scattered light scattered when irradiation light hits a particle (R) to direct the scattered light to the light reception element (), by utilizing two focal point positions of the ellipsoidal shape. The second reflection region () reflects scattered light coming from the particle (R) to direct the scattered light to the first reflection region (), so that the scattered light is directed to the light reception element () by utilizing the ellipsoidal shape of the first reflection region (). The light flux diameter of the scattered light reflected by the second reflection region () is larger than the particle (R), at the position of the particle (R) at which the scattered light is generated.

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