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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10669627 B1

PDFFull Text
Date of Patent:
Jun. 02, 2020

Filed:

Aug. 30, 2017

Multi-layer deposition system and process

Applicant:

Hzo, Inc., Draper, UT (US);

Inventors:

Yang Yun, Draper, UT (US);

Max Sorenson, Herriman, UT (US);

Chien-Lan Hsueh, Draper, UT (US);

Tining Su, Draper, UT (US);

Jim Dempster, Reno, NV (US);

Alex Anderson, Draper, UT (US);

Layton Baker, Draper, UT (US);

Assignee:

HzO, Inc., Morrisville, NC (US);

Attorney:

Intellectual Strategies

Primary Examiner:

Elizabeth A Burkhart

Int. Cl.
CPC ...
C23C 16/455 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); C23C 16/44 (2006.01); C23C 16/00 (2006.01); C23C 16/52 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 16/00 (2013.01); C23C 16/44 (2013.01); C23C 16/455 (2013.01); C23C 16/45544 (2013.01); C23C 16/52 (2013.01); H01L 21/6776 (2013.01); H01L 21/67161 (2013.01); H01L 21/67173 (2013.01); H01L 21/67207 (2013.01); H01L 21/022 (2013.01);
Abstract

A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.

Find Patent Forward Citations

Yun, Yang. (2020). Multi-layer deposition system and process (U.S. Patent No. 10669627). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10669627

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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