The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Sep. 26, 2017
Applicants:

Kazuyoshi Manabe, Toyota, JP;

Noritsugu Umehara, Nagoya, JP;

Hiroyuki Kousaka, Nagoya, JP;

Kazuyuki Ichimura, Nagoya, JP;

Inventors:

Kazuyoshi Manabe, Toyota, JP;

Noritsugu Umehara, Nagoya, JP;

Hiroyuki Kousaka, Nagoya, JP;

Kazuyuki Ichimura, Nagoya, JP;

Assignees:

TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota-shi, Aichi-ken, JP;

NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY, Nagoya-shi, Aichi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/34 (2006.01); C23C 14/54 (2006.01); C23C 14/06 (2006.01); C10M 177/00 (2006.01); C23C 14/02 (2006.01); C23C 14/00 (2006.01); C10M 103/02 (2006.01); C10M 141/06 (2006.01); C23C 14/46 (2006.01);
U.S. Cl.
CPC ...
C23C 16/347 (2013.01); C10M 103/02 (2013.01); C10M 177/00 (2013.01); C23C 14/0031 (2013.01); C23C 14/024 (2013.01); C23C 14/025 (2013.01); C23C 14/0605 (2013.01); C23C 14/0658 (2013.01); C23C 14/541 (2013.01); C10M 141/06 (2013.01); C10N 2230/06 (2013.01); C10N 2250/08 (2013.01); C10N 2260/09 (2013.01); C10N 2280/00 (2013.01); C23C 14/46 (2013.01); F05C 2203/0808 (2013.01);
Abstract

In an amorphous carbon film of a sliding member, provided that a number of nitrogen atoms each singly bonded to three carbon atoms is A, and a number of nitrogen atoms each singly and doubly bonded to two carbon atoms, respectively, is B, a value A/B of the amorphous carbon film obtained through X-ray photoelectron spectroscopy analysis is 10 to 18. The method includes irradiating the surface of the substrate with nitrogen ion beams and irradiating a carbon target with electron beams, thereby forming an amorphous carbon film on the surface of the substrate while vapor-depositing a part of the carbon target onto the surface of the substrate. The output of the electron beams that irradiate the carbon target is 30 to 50 W.


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