The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Dec. 28, 2016
Applicant:
Tosoh Corporation, Shunan-shi, JP;
Inventors:
Assignee:
TOSOH CORPORATION, Shunan-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/64 (2006.01); C04B 35/453 (2006.01); H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); C04B 35/626 (2006.01);
U.S. Cl.
CPC ...
C04B 35/453 (2013.01); C04B 35/62655 (2013.01); C04B 35/64 (2013.01); C23C 14/08 (2013.01); C23C 14/081 (2013.01); C23C 14/086 (2013.01); C23C 14/3414 (2013.01); H01J 37/3429 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3251 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/5409 (2013.01); C04B 2235/602 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6565 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/72 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); C04B 2235/96 (2013.01);
Abstract
An oxide sintered body is provided which does not splash from the target surface even at the time of high power film formation, has a high film formation rate, and is used in a sputtering target capable of providing a high-refractive-index film. An oxide sintered body is used which contains zinc, niobium, aluminum and oxygen as constituent elements and in whichNb/(Zn+Nb+Al)=0.076 to 0.289 andAl/(Zn+Nb+Al)=0.006 to 0.031, where Zn, Nb and Al denote contents of zinc, niobium and aluminum, respectively.