The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Feb. 02, 2017
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventors:
Qingyuan Zhao, Malden, MA (US);
Karl K. Berggren, Arlington, MA (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/18 (2006.01); G01J 1/44 (2006.01); G01J 3/02 (2006.01); G01J 1/42 (2006.01); G01J 5/02 (2006.01); H01L 39/10 (2006.01); H01L 39/12 (2006.01); H01L 39/16 (2006.01); G01J 5/06 (2006.01); G01J 3/28 (2006.01); G01J 5/20 (2006.01); H01L 23/66 (2006.01); H01L 39/24 (2006.01); H04N 5/378 (2011.01);
U.S. Cl.
CPC ...
H01L 27/18 (2013.01); G01J 1/42 (2013.01); G01J 1/44 (2013.01); G01J 3/0286 (2013.01); G01J 3/2803 (2013.01); G01J 5/023 (2013.01); G01J 5/061 (2013.01); G01J 5/20 (2013.01); H01L 23/66 (2013.01); H01L 39/10 (2013.01); H01L 39/125 (2013.01); H01L 39/16 (2013.01); H01L 39/2416 (2013.01); H04N 5/378 (2013.01); G01J 2001/442 (2013.01); G01J 2001/4446 (2013.01); H01L 2223/6627 (2013.01); H01L 2223/6672 (2013.01);
Abstract
An integrated, superconducting imaging sensor may be formed from a single, meandering nanowire. The sensor is capable of single-photon (or single-event) detection and imaging with ˜10 micron spatial resolution and sub-100-picosecond temporal resolution. The sensor may be readily scaled to large areas.