The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Jan. 04, 2019
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Ja-Woo Lee, Hwaseong-si, KR;
Keon-Woo Kim, Seongnam-si, KR;
Sun-Ho Kim, Seoul, KR;
Eung-Su Kim, Seoul, KR;
Bo-Ra Yoon, Goyang-si, KR;
Hyan-Jung Lee, Hwaseong-si, KR;
Tae-Il Cho, Daejeon, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01J 37/3288 (2013.01); H01J 37/32642 (2013.01); H01L 21/67242 (2013.01); H01L 21/67253 (2013.01); H01L 21/67259 (2013.01); H01L 21/67288 (2013.01); H01L 21/6833 (2013.01); H01L 21/68707 (2013.01); H01L 21/68735 (2013.01); H01L 21/68742 (2013.01);
Abstract
A first edge ring is removed from a substrate support within a process module using a transfer robot. The transfer robot is then used to place a second edge ring on the substrate support. An image sensor (e.g., a disk-shaped wireless image sensor) is positioned over the second edge ring using the transfer robot. The image sensor generates image information, which is analyzed to determine alignment of the second edge ring.