The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Jun. 15, 2015
Applicant:
Brooks Ccs Gmbh, Radolfzell, DE;
Inventor:
Lutz Rebstock, Gaienhofen, DE;
Assignee:
BROOKS CCS, GmbH, Gaienhofen, DE;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01); H01L 21/673 (2006.01); A47J 47/20 (2019.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67313 (2013.01); A47J 47/20 (2013.01); H01L 21/02041 (2013.01); H01L 21/30604 (2013.01); H01L 21/67057 (2013.01); H01L 21/67086 (2013.01);
Abstract
Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.