The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Dec. 20, 2018
Toho Engineering Co., Ltd., Yokkaichi-shi, JP;
Osaka University, Suita-shi, Osaka, JP;
Eisuke Suzuki, Yokkaichi, JP;
Kazuto Yamauchi, Suita, JP;
Tatsutoshi Suzuki, Yokkaichi, JP;
Daisuke Suzuki, Yokkaichi, JP;
OSAKA UNIVERSITY, Suita-Shi, Osaka, JP;
TOHO ENGINEERING CO., LTD., Yokkaichi-Shi, JP;
Abstract
A method for planarizing a workpiece includes bringing a surface of the workpiece and a surface of a pad having a catalyst layer at least on the surface thereof into contact with or proximal to each other, rotating a first one of the workpiece and the pad in a plane of the surface of the first one around a central axis that intersects the surface of the first one while supplying a liquid that supports a catalytic reaction between the surface of the workpiece and the catalyst layer on the surface of the pad, and simultaneously reciprocally moving a second one of the workpiece and the pad in a direction parallel to the surface of the second one by at least an amount that makes possible planarization of the surface of the workpiece based on the catalytic reaction.