The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Dec. 28, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventor:
Tea-Geon Kim, Asan-si, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B08B 1/02 (2006.01); B08B 3/14 (2006.01); B08B 3/12 (2006.01); B08B 3/04 (2006.01); B08B 1/00 (2006.01); B08B 1/04 (2006.01); B08B 3/10 (2006.01); B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67046 (2013.01); B08B 1/001 (2013.01); B08B 1/007 (2013.01); B08B 1/04 (2013.01); B08B 3/00 (2013.01); B08B 3/102 (2013.01); B08B 3/12 (2013.01); H01L 21/67034 (2013.01);
Abstract
A substrate cleaning apparatus includes a porous suction part having a polygonal pillar shape with a plurality of cleaning surfaces, a transfer unit to transfer a substrate with a plurality of semiconductor devices toward the porous suction part, and to contact the semiconductor devices with one of the plurality of cleaning surfaces, and a rotation driving part to rotate the porous suction part.