The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2020

Filed:

May. 08, 2018
Applicants:

Boe Technology Group Co., Ltd., Beijing, CN;

Ordos Yuansheng Optoelectronics Co., Ltd., Inner Mongolia, CN;

Inventors:

Jingshuai Wang, Beijing, CN;

Chul Ho Lee, Beijing, CN;

Yongzhi Hao, Beijing, CN;

Xiaoqiang Han, Beijing, CN;

Zhanpeng Zhang, Beijing, CN;

Guimei Zhang, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/36 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); H01L 27/12 (2006.01); H01L 21/67 (2006.01); B23K 26/00 (2014.01); B23K 26/12 (2014.01); B23K 26/352 (2014.01); B23K 26/14 (2014.01); B23K 26/08 (2014.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02683 (2013.01); B23K 26/0006 (2013.01); B23K 26/0823 (2013.01); B23K 26/123 (2013.01); B23K 26/14 (2013.01); B23K 26/352 (2015.10); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/67115 (2013.01); H01L 21/68764 (2013.01); H01L 27/1222 (2013.01); H01L 27/1285 (2013.01); B23K 2101/40 (2018.08); B23K 2103/56 (2018.08);
Abstract

A laser annealing apparatus including a carrying platform with a fixing surface, a laser source and a driving device. The laser source is configured to emit a laser beam toward the fixing surface, the laser beam having an illumination area which covers a center of the fixing surface and extends toward an edge of the fixing surface, in an extending direction of the illumination area the illumination area having a length which is not less than a distance between the center of the fixing surface and the edge of the fixing surface. The driving device is configured to drive the carrying platform to rotate around the center of the fixing surface.


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