The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Nov. 21, 2017
Applicant:

Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd., Wuhan, Hubei, CN;

Inventor:

Bo Liang, Hubei, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); H01L 51/00 (2006.01); B32B 9/04 (2006.01); H01L 51/50 (2006.01); C23C 16/513 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0097 (2013.01); B32B 9/045 (2013.01); H01L 51/50 (2013.01); B32B 2250/03 (2013.01); B32B 2250/40 (2013.01); B32B 2255/10 (2013.01); B32B 2255/20 (2013.01); B32B 2307/732 (2013.01); B32B 2457/206 (2013.01); C23C 16/402 (2013.01); C23C 16/513 (2013.01); H01L 2251/5338 (2013.01);
Abstract

A fabricating method of a flexible substrate is provided, including: step 1: fabricating a first flexible base; step 2: fabricating at least one layer of a laminated material made of silicon oxide and amorphous silicon on the first flexible base; step 3: performing a dehydrogenation treatment to the laminated material; and step 4: fabricating a second flexible base on the laminated material to obtain a flexible substrate. Compared with the prior art, by disposing two layers of flexible bases and a laminated material between the flexible bases, the stability of multiple bending can be improved; by performing a dehydrogenation treatment of the laminated material, the defects of the flexible substrate in the back-end process can be reduced.


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