The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Feb. 05, 2016
Sinfonia Technology Co., Ltd., Tokyo, JP;
Toshihiro Kawai, Tokyo, JP;
Takashi Shigeta, Tokyo, JP;
Munekazu Komiya, Tokyo, JP;
Yasushi Taniyama, Tokyo, JP;
SINFONIA TECHNOLOGY CO., LTD., Tokyo, JP;
Abstract
The transfer chamber transfers a wafer (W) as a transferred object to or from a processing device () by using a transfer robot () provided thereinside, and includes a circulation path (CL) formed inside of a transfer chamber () to circulate gas, a chemical filter unit () as a chemical filter provided in the midstream of the circulation path (CL), a humidity detector (HG) as a humidity detection means which detects internal humidity, a gas supply means (NS) which supplies gas to the inside of the transfer chamber (), and a moisture supply means (HS) which supplies moisture content to the inside of the transfer chamber (). The moisture supply means (HS) is made to operate in accordance with a humidity detection value by the humidity detection means.