The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Sep. 28, 2017
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Varun Sharma, Helsinki, FI;
Assignee:
ASM IP Holdings B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01J 37/32 (2006.01); H01L 21/3065 (2006.01); C23C 16/455 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67069 (2013.01); C23C 16/4488 (2013.01); C23C 16/45544 (2013.01); C23C 16/45561 (2013.01); H01J 37/32009 (2013.01); H01L 21/3065 (2013.01); H01L 21/67017 (2013.01); H01J 2237/334 (2013.01);
Abstract
A chemical dispensing apparatus for providing a chlorine vapor to a reaction chamber is disclosed. The chemical dispensing apparatus may include: a chemical storage vessel configured for storing a chlorine-containing chemical species, a reservoir vessel in fluid communication with the chemical storage vessel, the reservoir vessel configured for converting the chlorine-containing chemical species to the chlorine vapor, and a reaction chamber in fluid communication with the reservoir vessel. Methods for dispensing a chlorine vapor to a reaction chamber are also disclosed.