The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Mar. 28, 2017
Applicant:

Inter-university Research Institute Corporation National Institutes of Natural Sciences, Tokyo, JP;

Inventor:

Yukinori Nagatani, Okazaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/295 (2006.01); H01J 37/26 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/10 (2006.01);
U.S. Cl.
CPC ...
H01J 37/295 (2013.01); H01J 37/22 (2013.01); H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/10 (2013.01); H01J 2237/2482 (2013.01); H01J 2237/2614 (2013.01);
Abstract

A phase contrast transmission electron microscope apparatus has a long-life phase modulator, enabling changes in quantity of phase modulation, barely absorbing the electron beams, and not being influenced by irradiation of the electron beams. An electron microscope comprises an electron gun, a first laser beam irradiating process, being positioned between the electron source and an object lens, for irradiating laser beams onto the electron beams radiated from the electron gun, a second laser beam irradiating process, being positioned on a focal plane behind the object lens, for focusing and irradiating the laser beams upon the focus of the electron beams penetrating through a specimen, and a screen or a 2D electron sensor for detecting a specimen image in the form of distribution of intensity of the electron beams by an optical system.


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