The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Jan. 27, 2017
Agilent Technologies, Inc., Santa Clara, CA (US);
Andrew Ghetler, San Jose, CA (US);
Richard P. Tella, Sunnyvale, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A scanning apparatus having a stage adapted to hold a specimen to be imaged and to move the specimen in a first direction, and a light source that includes a tunable laser that generates a light beam having an illumination wavelength that varies as a function of an input signal is disclosed. The apparatus includes an imaging system having a scanning assembly that includes a focusing lens that focuses the light beam to a measurement point on the specimen, a first mirror that moves in a second direction relative to the stage such that the focusing lens maintains a fixed distance between the focusing lens and the stage, and a displacement sensor that measures a distance between the scanning assembly at a mapping point on the specimen, and a light detector that measures an intensity of light leaving the measurement point on the specimen.