The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
May. 15, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Takayuki Uozumi, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A measurement apparatus measures an optical characteristic with high robustness and with a simple configuration. A measurement apparatus of the present invention measures optical characteristic of a sample. The measurement apparatus includes an irradiation unit to irradiate the sample with light emitted from a light source and transmitted through an opening member, an imaging unit to detect an image formed by the light irradiated by the irradiation unit and reflected by the sample, and a processing unit to obtain the optical characteristic of the sample on the basis of an output of the imaging unit. The opening member comprises plural openings through which the light emitted from the light source is transmitted, the irradiation unit irradiates the sample with the light transmitted through the plurality of openings, and the imaging unit detects an image formed by the light transmitted through the plurality of openings and reflected by the sample.