The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Oct. 11, 2019
Applicant:
Rosemount Aerospace Inc., Burnsville, MN (US);
Inventors:
Timothy Thomas Golly, Lakeville, MN (US);
David P. Potasek, Lakeville, MN (US);
Cuong Tho Huynh, Eagan, MN (US);
Assignee:
Rosemount Aerospace Inc., Burnsville, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); G01L 19/14 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0048 (2013.01); G01L 9/0042 (2013.01); G01L 9/0052 (2013.01); G01L 9/0055 (2013.01); G01L 19/146 (2013.01); G01L 19/147 (2013.01); G01L 9/008 (2013.01); G01L 9/0054 (2013.01);
Abstract
A MEMS device includes a backing wafer with a support portion and central back plate connected to the support portion with spring flexures, a diaphragm wafer with a support portions and a sensing portion connected to the support portion with spring flexures, a passivation layer on the diaphragm, and a topping wafer. The device allows for stress isolation of a diaphragm in a piezoresistive device without a large MEMS die.