The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
May. 24, 2018
Applicant:
Saint-gobain Ceramics & Plastics, Inc., Worcester, MA (US);
Inventors:
Douglas Edwin Ward, Santa Ana, CA (US);
Jason A. Sherlock, Anaheim, CA (US);
Angela Wamina Kwapong, Worcester, MA (US);
Assignee:
SAINT-GOBAIN CERAMICS & PLASTICS, INC., Worcester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G09G 1/04 (2006.01); C09G 1/04 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); C09G 1/06 (2006.01);
U.S. Cl.
CPC ...
C09G 1/04 (2013.01); H01L 21/02024 (2013.01); H01L 21/30625 (2013.01); C09G 1/06 (2013.01);
Abstract
The present disclosure is directed to a fluid composition that can be used in chemical-mechanical polishing processes of inorganic material. The fluid composition can include at least one oxidizing agent and a multivalent cation component. Using the fluid composition during a chemical-mechanical polishing process can facilitate a relatively defect free material surface after polishing while achieving a suitable material removal rate.