The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Nov. 22, 2016
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Andreas Krauss, Tuebingen, DE;

Nicola Mingirulli, Stuttgart, DE;

Robert Bonasewicz, Stuttgart, DE;

Assignee:

Robert Bosch GmbH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 7/00 (2006.01); H01L 23/28 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00825 (2013.01); B81C 1/00333 (2013.01); H01L 23/28 (2013.01); H01L 24/45 (2013.01); B81B 7/0058 (2013.01); B81B 2201/0264 (2013.01); B81C 1/00 (2013.01); B81C 1/00309 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0154 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48465 (2013.01); H01L 2924/00014 (2013.01);
Abstract

At least one semiconductor component is packaged by covering at least one partial surface of the at least one semiconductor component with at least one chemically or physically dissoluble sacrificial material; surrounding the at least one semiconductor component at least partially with a photoablatable packaging material; exposing the sacrificial material on the at least one partial surface of the at least one semiconductor component at least partially by forming at least one trench through at least the packaging material using a light beam; and exposing the at least one partial surface of the at least one semiconductor component at least partially by at least partially removing the previously exposed sacrificial material using a chemical or physical removal method to which the packaging material has a higher resistance than the sacrificial material.


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