The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Dec. 26, 2017
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Wei-Chien Tsai, Miaoli County, TW;

Hao-Wen Cheng, Pingtung County, TW;

Jin-Bao Wu, Hsinchu, TW;

Ming-Sheng Leu, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24D 18/00 (2006.01); C23C 16/56 (2006.01); C23C 16/52 (2006.01); C23C 16/32 (2006.01);
U.S. Cl.
CPC ...
B24D 18/00 (2013.01); C23C 16/325 (2013.01); C23C 16/52 (2013.01); C23C 16/56 (2013.01);
Abstract

A grinding disk and a method of manufacturing the same are provided. The grinding disk includes a graphite base and a silicon carbide film, the silicon carbide film covering the graphite base, and the silicon carbide film has a surface grain size of 5 μm to 80 μm. By a hot-wall chemical vapor deposition system, a highly dense silicon carbide film is formed on a surface of the graphite base. The grinding disk may replace a conventional metallographic grinding and polishing disk, and is improved in characteristics such as hydrophobicity and abrasion resistance.


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