The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Dec. 29, 2017
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Ting-Ta Yen, San Jose, CA (US);
Brian Goodlin, Plano, TX (US);
Ricky Alan Jackson, Richardson, TX (US);
Nicholas Stephen Dellas, Dallas, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01); H03H 3/007 (2006.01); H03H 9/17 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/09 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02433 (2013.01); B81B 7/0016 (2013.01); B81B 7/0048 (2013.01); B81C 1/0015 (2013.01); H03H 3/0073 (2013.01); H03H 9/02133 (2013.01); H03H 9/0547 (2013.01); H03H 9/09 (2013.01); H03H 9/1007 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); B81B 2201/0271 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/012 (2013.01); B81C 2203/0154 (2013.01); B81C 2203/0785 (2013.01); H03H 2009/0248 (2013.01);
Abstract
In described examples of a micromechanical system (MEMS), a rigid cantilevered platform is formed on a base substrate. The cantilevered platform is anchored to the base substrate by only a single anchor point. A MEMS resonator is formed on the cantilevered platform.