The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Aug. 09, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Deepak Jadhav, Karnataka, IN;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H04N 5/33 (2006.01); H04N 5/232 (2006.01); G01J 5/02 (2006.01); H04N 5/225 (2006.01); G01J 5/04 (2006.01); H01L 21/67 (2006.01); H04N 5/247 (2006.01); G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01J 5/025 (2013.01); G01J 5/028 (2013.01); G01J 5/0215 (2013.01); G01J 5/042 (2013.01); H01L 21/67248 (2013.01); H01L 22/26 (2013.01); H04N 5/2258 (2013.01); H04N 5/23296 (2013.01); H04N 5/247 (2013.01); H04N 5/33 (2013.01); G01J 2005/0077 (2013.01); H01L 22/34 (2013.01);
Abstract
Thermal monitors comprising a substrate with at least one camera position on a bottom surface thereof, a wireless communication controller and a battery. The camera has a field of view sufficient to produce an image of at least a portion of a wafer support, the image representative of the temperature within the field of view. Methods of using the thermal monitors are also described.