The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2020

Filed:

Mar. 29, 2017
Applicant:

Kaneka Corporation, Osaka, JP;

Inventors:

Minoru Miyamoto, Toyooka, JP;

Yutaka Yanagihara, Toyooka, JP;

Hideyuki Makita, Toyooka, JP;

Assignee:

KANEKA CORPORATION, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/677 (2006.01); H01L 31/0224 (2006.01); C23C 16/458 (2006.01); H01L 31/0236 (2006.01); H01L 31/0747 (2012.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); C23C 16/458 (2013.01); H01L 21/677 (2013.01); H01L 21/6835 (2013.01); H01L 31/0224 (2013.01); H01L 31/02363 (2013.01); H01L 31/022466 (2013.01); H01L 31/0747 (2013.01); H01L 31/1884 (2013.01);
Abstract

A sample transfer system includes a sample-mounting member mounting a sample thereonto, and a sample-moving device lifting the sample to move the sample between the sample-mounting member and another location. The sample-mounting member includes a first predetermined sample-mounting region mounting the sample, and a recessed part on or around a side of the first predetermined sample-mounting region. The sample-moving device includes a first sample-holding device, the first sample-holding device including a sample-holding surface facing the sample to be lifted, a first contact member contacting with part of the sample, and a movement mechanism moving the first contact member in a direction along the sample-holding surface. Part of the contact member enters the recessed part when the first sample-holding device is brought ill proximity to the first predetermined sample-mounting region, the part of the contact member moving within the recessed part by operating the movement mechanism.


Find Patent Forward Citations

Loading…