The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Aug. 01, 2017
Applicant:
Epistar Corporation, Hsinchu, TW;
Inventors:
Chih-Wei Wei, Hsinchu, TW;
Chia-Liang Hsu, Hsinchu, TW;
Assignee:
EPISTAR CORPORATION, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/67 (2006.01); B21D 37/14 (2006.01); B29C 48/154 (2019.01); B29C 35/10 (2006.01); B29C 48/06 (2019.01); B29C 48/19 (2019.01); B29C 48/91 (2019.01); B29C 48/88 (2019.01); B29C 35/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68 (2013.01); B21D 37/14 (2013.01); B29C 48/154 (2019.02); H01L 21/67109 (2013.01); B29C 35/10 (2013.01); B29C 48/06 (2019.02); B29C 48/19 (2019.02); B29C 48/91 (2019.02); B29C 48/9135 (2019.02); B29C 2035/0811 (2013.01);
Abstract
An apparatus for transferring a semiconductor device comprises platform comprising a carrier; a positioning unit above the platform and comprising an opening; and an elevating unit connecting the platform and the positioning unit; and a heater.