The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Feb. 22, 2017
Kathirgamasundaram Sooriakumar, Rochester, NY (US);
Anu Austin, Lengkong Tiga, SG;
Ian Rose Bihag, Cebu, PH;
Dieter Naegele-preissmann, Ingelheim am Rhein, DE;
Kathirgamasundaram Sooriakumar, Rochester, NY (US);
Anu Austin, Lengkong Tiga, SG;
Ian Rose Bihag, Cebu, PH;
Dieter Naegele-Preissmann, Ingelheim am Rhein, DE;
Other;
Abstract
Aspects of the disclosure provide a capacitive pressure sensor. The capacitive pressure sensor can include a first substrate having a first surface and a second surface, a movable plate at a bottom of a first cavity recessed into the substrate from the first surface, and a second substrate bonded to the first substrate over the first surface. A second cavity is formed between the movable plate and the second surface. The second substrate includes a fixed plate disposed over the movable plate to form a capacitor. The second substrate further includes a third cavity between a surface of the fixed plate opposite to the movable plate and a surface of the second substrate opposite to the first substrate.