The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2020

Filed:

Jul. 31, 2017
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Helmut Grutzeck, Kusterdingen, DE;

Jochen Reinmuth, Reutlingen, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00158 (2013.01); G01L 9/0042 (2013.01); G01L 19/0609 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/053 (2013.01);
Abstract

A micromechanical component including a mounting including a spanned diaphragm, which is warpable via a pressure difference between a first diaphragm side and a second diaphragm side against a diaphragm counter force according to a diaphragm spring constant of the diaphragm, and at least one actuator electrode, which is connected to the diaphragm and adjustable against a spring force according to at least one spring constant of at least one spring with the aid of a warping of the diaphragm, an overall system spring constant being definable as the sum of a diaphragm spring constant of the diaphragm and the spring constant of the single spring, or an overall spring constant of all springs, via which the at least one actuator electrode is connected to the mounting, and the spring constant of the single spring or of all springs being at least 5% of the overall system spring constant.


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