The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Aug. 22, 2017
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Abstract
There is furnished a working tool comprising a rotating shaft (), a polishing plate () mounted on the shaft, an expandable elastomer sheet () attached to the polishing plate (), an abrasive cloth () attached to the elastomer sheet (), and means for pressing the elastomer sheet () at a plurality of positions under respective predetermined different pressures such that a lower surface of the abrasive cloth () is deformed to the desired inverted convex shape in accordance with differences of pressing force applied to the elastomer sheet () at the plurality of positions. A substrate is produced by bringing the inverted convexly deformed surface of the abrasive cloth () in contact with a substrate stock, and rotating and moving the working tool for polishing the substrate over a selected area.