The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Jul. 29, 2015
Applicant:
Shigenkaihatsukenkyujyo, Inc., Tokyo, JP;
Inventors:
Assignee:
SHIGENKAIHATSUKENKYUJYO, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 5/00 (2006.01); B01F 5/12 (2006.01); H01L 21/304 (2006.01); B01F 5/02 (2006.01); B01F 3/04 (2006.01); B08B 3/10 (2006.01); H01L 21/02 (2006.01); B01F 13/10 (2006.01);
U.S. Cl.
CPC ...
B01F 5/12 (2013.01); B01F 3/0446 (2013.01); B01F 3/04049 (2013.01); B01F 5/0057 (2013.01); B01F 5/0206 (2013.01); B08B 3/10 (2013.01); H01L 21/02041 (2013.01); H01L 21/304 (2013.01); B01F 2003/04886 (2013.01); B01F 2013/1052 (2013.01);
Abstract
The problem to be addressed by the present invention is to provide a cleaning apparatus capable of obtaining a cleaning liquid having a high degree of cleanliness. A cleaning apparatusincludes a dissolution tankfor dissolving a gas in a liquid, a transfer pumpfor sending the liquid together with the gas into the dissolution tank, and a feed nozzlefor feeding the liquid stored in the dissolution tankto a workpiece W. The transfer pumpis a positive displacement pump. Portions of the dissolution tank, the transfer pump, and the feed nozzlethat come into contact with the liquid are made of a fluororesin.