The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Mar. 27, 2014
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Takeshi Endo, Yokohama, JP;

Satoshi Miura, Yokohama, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/10 (2006.01); H05G 1/32 (2006.01); G01N 23/04 (2018.01); G05B 19/4097 (2006.01); H01J 35/14 (2006.01);
U.S. Cl.
CPC ...
H05G 1/32 (2013.01); G01N 23/04 (2013.01); G05B 19/4097 (2013.01); H01J 35/14 (2013.01); H05G 1/10 (2013.01); G05B 2219/35134 (2013.01); G05B 2219/49007 (2013.01);
Abstract

An X-ray generation device that emits X-rays due to an electron beam emitted from a cathode arriving at a target, includes: first and second high voltage power supplies that are connected in series between the cathode and the target, and both of which accelerate the electron beam; and wherein the second high voltage power supply outputs a second high voltage so that, with respect to a phase of a ripple component of a first high voltage generated by the first high voltage power supply, a phase of a ripple component of the second high voltage generated by the second high voltage power supply has a predetermined relationship.


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