The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Dec. 20, 2018
Applicant:

Fuji Electric Co., Ltd., Kanagawa, JP;

Inventor:

Katsunori Ueno, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/417 (2006.01); H01L 29/16 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7813 (2013.01); H01L 29/1608 (2013.01); H01L 29/2003 (2013.01); H01L 29/41766 (2013.01); H01L 29/66068 (2013.01); H01L 29/7806 (2013.01); H01L 29/7827 (2013.01);
Abstract

A vertical semiconductor device is provided, including a transistor region and a Schottky diode region, and having, in a gallium nitride layer in the Schottky diode region, a first well region, a diode trench portion that is provided in direct contact with the first well region in an array direction in which the transistor region and the Schottky diode region are arrayed, a first upper drift region that is connected to the bottom of the diode trench portion, a lower drift region that is connected to the bottom of the first well region and a bottom of the first upper drift region, and a conductive portion that is connected to an upper portion of the first upper drift region.


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