The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Oct. 25, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jean Delmas, Santa Clara, CA (US);
Charles T. Carlson, Cedar Park, TX (US);
Robert Brent Vopat, Austin, TX (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); F22G 7/00 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); F22G 7/00 (2013.01); H01L 21/324 (2013.01); H01L 21/67017 (2013.01);
Abstract
A system for annealing substrates is provided. The system includes a first boiler having an input coupled to a water source; a second boiler having an input connected to an output of the first boiler; and a batch processing chamber coupled to the output of the second boiler, wherein the batch processing chamber is configured to anneal a plurality of substrates using steam from the second boiler.