The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Apr. 20, 2018
Applicant:
Iucf-hyu (Industry-university Cooperation Foundation Hanyang University), Seoul, KR;
Inventors:
Myung Mo Sung, Seoul, KR;
Kyu-Seok Han, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/04 (2006.01); C23C 16/02 (2006.01); C23C 28/04 (2006.01); C23C 16/40 (2006.01); C23C 28/00 (2006.01); C23C 16/26 (2006.01); C23C 16/455 (2006.01); H01L 29/16 (2006.01); H01L 29/167 (2006.01); H01L 21/306 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/041 (2013.01); C23C 16/0209 (2013.01); C23C 16/0272 (2013.01); C23C 16/26 (2013.01); C23C 16/407 (2013.01); C23C 16/45525 (2013.01); C23C 28/00 (2013.01); C23C 28/04 (2013.01); H01L 29/1606 (2013.01); H01L 29/167 (2013.01); H01L 21/306 (2013.01); H01L 29/78684 (2013.01);
Abstract
A method for manufacturing a functionalized graphene structure includes preparing a substrate having a graphene layer, forming an organic linker layer by providing an organic linker on the graphene layer, and forming a dopant layer by providing a dopant material including a metal on the organic linker layer. The organic linker layer and the dopant layer are formed in-situ.