The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Feb. 07, 2017
Applicant:

United Technologies Corporation, Farmington, CT (US);

Inventors:

James W. Neal, Ellington, CT (US);

Michael J. Maloney, Marlborough, CT (US);

Kevin W. Schlichting, South Glastonbury, CT (US);

David A. Litton, West Hartford, CT (US);

Assignee:

United Technologies Corporation, Farmington, CT (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); G01K 1/14 (2006.01); G01K 7/02 (2006.01); G01K 13/08 (2006.01); C23C 14/50 (2006.01); C23C 14/24 (2006.01); C23C 14/54 (2006.01); G01N 25/00 (2006.01); H01J 37/317 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3005 (2013.01); C23C 14/243 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); G01K 1/14 (2013.01); G01K 7/02 (2013.01); G01K 13/08 (2013.01); G01N 25/00 (2013.01); H01J 37/3178 (2013.01); C23C 14/30 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/20214 (2013.01);
Abstract

A system for measuring a temperature of a rotating workpiece comprises a deposition chamber, a crucible within the deposition chamber, an energy source, a drive system, a temperature sensor, first and second sensor wires, a dynamic electrical connection, and a control system. The crucible is configured to hold a deposition feedstock material. The energy source is configured to evaporate the deposition feedstock material. The drive system is configured to rotate the workpiece such that the evaporated deposition feedstock material can impinge the rotating workpiece. The temperature sensor is configured to sense the temperature of the rotating workpiece. The first and second sensor wires are electrically connected to the temperature sensor. The dynamic electrical connection is configured to electrically communicate the signal indicative of the sensed temperature from the rotatable workpiece holder to the stationary portion. The control system is configured to measure the temperature of the workpiece during rotation.


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