The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Dec. 06, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Robert A. Groves, Highland, NY (US);

Sarath L. K. Parambil, Calicut, IN;

Venkata N. R. Vanukuru, Bangalore, IN;

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01F 41/02 (2006.01); H01F 41/06 (2016.01); H01F 17/00 (2006.01); H01F 41/04 (2006.01); H01F 41/076 (2016.01); H01F 41/061 (2016.01); H01F 41/074 (2016.01); H01F 27/28 (2006.01);
U.S. Cl.
CPC ...
H01F 41/06 (2013.01); H01F 17/0006 (2013.01); H01F 17/0013 (2013.01); H01F 27/28 (2013.01); H01F 41/02 (2013.01); H01F 41/041 (2013.01); H01F 41/061 (2016.01); H01F 41/074 (2016.01); H01F 41/076 (2016.01); H01F 2017/002 (2013.01); H01F 2017/0046 (2013.01); Y10T 29/4902 (2015.01); Y10T 29/49062 (2015.01); Y10T 29/49073 (2015.01);
Abstract

Fabrication methods for a 3D multipath inductor, including forming a metal layer to form spiral turns about a center region, the spiral turns including segments that extend length-wise along the turns and having positions that vary from an innermost position and an outermost position relative to the center region; forming a lateral cross-over configured to couple portions of lateral segments in different relative positions from the center region to form lateral segment paths that have a substantially same length for all lateral segment paths in a grouping thereof; forming an additional metal layer to form spiral turns about the center region including corresponding geometry to the first metal layer; and forming a vertical cross-over configured to couple portions of segments on different metal layers to form vertical segment paths that have a substantially same length for all vertical segment paths in a grouping thereof.


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