The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Mar. 01, 2019
Shimadzu Corporation, Kyoto, JP;
Kazuma Watanabe, Kyoto, JP;
Keita Fujino, Kyoto, JP;
Eiji Iida, Kyoto, JP;
Masato Hirade, Kyoto, JP;
Kenji Yamasaki, Kyoto, JP;
Hideo Nakajima, Kyoto, JP;
Yuichiro Ikeda, Kyoto, JP;
Hiroshi Arai, Kyoto, JP;
Shimadzu Corporation, Nakagyo-ku, Kyoto-shi, Kyoto, JP;
Abstract
Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.