The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Aug. 21, 2018
Infineon Technologies Ag, Neubiberg, DE;
Christian Bretthauer, Munich, DE;
Alfons Dehe, Villingen-Schwenning, DE;
Prashanth Makaram, Munich, DE;
Abidin Güçlü Onaran, Munich, DE;
Arnaud Walther, Unterhaching, DE;
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Abstract
In accordance with an embodiment, a MEMS sensor includes a membrane that is suspended from the substrate, a resonant frequency of said membrane being influenced by an ambient pressure that acts on the membrane; and an evaluation device configured to perform a first measurement based on the resonant frequency of the membrane to obtain a measurement result, where the evaluation device is configured to at least partly compensate an influence of the ambient pressure on the measurement result.