The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Oct. 11, 2018
Applicant:

Carl Zeiss Industrielle Messtechnik Gmbh, Oberkochen, DE;

Inventors:

Otto Ruck, Ellwangen, DE;

David Hoecherl, Aalen, DE;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 9/04 (2006.01); G01B 7/012 (2006.01); G02B 21/36 (2006.01);
U.S. Cl.
CPC ...
G01B 11/007 (2013.01); G01B 7/012 (2013.01); G01B 9/04 (2013.01); G02B 21/361 (2013.01);
Abstract

A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.


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