The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
May. 24, 2018
Seiko Epson Corporation, Tokyo, JP;
Sayaka Yamasaki, Chino, JP;
Hiroaki Tamura, Shimosuwa, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
There is provided a piezoelectric device including a pressure chamber, a piezoelectric element, and a diaphragm disposed between the pressure chamber and the piezoelectric element. The diaphragm has a crystal plane of an anisotropic single crystal silicon base of which a Young's modulus varies according to a direction in the crystal plane. In a vibration region of the diaphragm, which overlaps the pressure chamber in plan view, a first Young's modulus in a first direction, out of Young's modulus in the crystal plane, is higher than a second Young's modulus in the crystal plane in a second direction intersecting the first direction. A width of the piezoelectric element in the first direction is larger than a width of the piezoelectric element in the second direction.