The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Nov. 29, 2017
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventor:

Seiji Kai, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H03H 9/25 (2006.01); H03H 9/10 (2006.01); H03H 9/05 (2006.01); H01L 41/047 (2006.01); H01L 41/18 (2006.01); H03H 9/145 (2006.01); H03H 9/64 (2006.01); H03H 3/08 (2006.01); H03H 9/205 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02574 (2013.01); H01L 41/047 (2013.01); H01L 41/18 (2013.01); H03H 9/02086 (2013.01); H03H 9/02992 (2013.01); H03H 9/059 (2013.01); H03H 9/1064 (2013.01); H03H 9/1071 (2013.01); H03H 9/14541 (2013.01); H03H 9/25 (2013.01); H03H 9/64 (2013.01); H03H 3/08 (2013.01); H03H 9/0222 (2013.01); H03H 9/205 (2013.01);
Abstract

An elastic wave device includes a support substrate, a film stack including a piezoelectric thin film, and an IDT electrode. The film stack is partially absent in a region outside a region where the IDT electrode is located in plan view. The elastic wave device further includes a support layer located on the support substrate in at least a portion of a region where the film stack is partially absent and surrounds a region where the film stack is located in plan view and a cover member located on the support layer. The cover member defines a hollow space facing the IDT electrode together with the piezoelectric thin film and the support layer.


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