The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Mar. 05, 2018
Sharp Kabushiki Kaisha, Osaka, JP;
Sharp Kabushiki Kaisha, Osaka, JP;
Abstract
A micro-electro-mechanical systems (MEMS) array system is configured to apply suction forces for the manipulation of objects. The MEMS system includes includes a two-dimensional MEMS array of a plurality of individual MEMS elements. Each MEMS element comprises: a casing structure; a flexible membrane attached to the casing structure; and an electrode structure, wherein a voltage applied to the electrode structure actuates the MEMS element to cause the flexible membrane to flex relative to the casing structure. The flexible membrane and the casing structure define a gap into which the flexible membrane may flex, and a foot extends from the flexible membrane in a direction away from the casing structure, wherein the foot and the flexible membrane define a clearance region on an opposite side of the flexible membrane from the gap. When the MEMS element interacts with an object to be manipulated the foot spaces the membrane apart from the object. The MEMS array system further includes a control circuit that selectively actuates one or more of the MEMS elements of the MEMS array.