The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Apr. 04, 2018
Applicant:

Avago Technologies International Sales Pte. Limited, Singapore, SG;

Inventor:

Claudio Piemonte, Regensburg, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/144 (2006.01); H01L 31/02 (2006.01); H01L 31/107 (2006.01); H01L 31/028 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1446 (2013.01); H01L 29/66113 (2013.01); H01L 31/02005 (2013.01); H01L 31/028 (2013.01); H01L 31/02027 (2013.01); H01L 31/107 (2013.01);
Abstract

A semiconductor device, sensor, and array of SPAD cubes are described. One example of the disclosed sensor includes at least one Single Photon Avalanche Diode (SPAD) cube established in a substrate, the at least one SPAD cube including a photosensitive area that is configured to produce an electrical signal in response to light impacting the photosensitive area, where the photosensitive area is positioned at a first side of the at least one SPAD cube, a contact that receives the electrical signal, where the contact is positioned at a second side of the at least one SPAD cube that opposes the first side of the at least one SPAD cube, and at least one trench that spans an entire thickness of the substrate thereby electrically and optically isolating the at least one SPAD cube from adjacent SPAD cubes.


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