The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2020
Filed:
Oct. 30, 2018
Korea Advanced Institute of Science and Technology, Daejeon, KR;
Yang-Kyu Choi, Daejeon, KR;
Jun-Young Park, Daejeon, KR;
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY, Daejeon, KR;
Abstract
Disclosed are a vertically-integrated 3-dimensional flash memory for improving a reliability of cells and a fabrication method thereof. The fabrication method of the vertically-integrated 3-dimensional flash memory includes sequentially stacking a first insulating layer and a second insulating layer on a substrate to form a plurality of insulating layers, etching a portion of the insulating layers to expose an area of the substrate, forming a channel layer on a side surface of the etched insulating layers and on the substrate, forming a first macaroni layer on the channel layer, and forming a second macaroni layer on the first macaroni layer such that a side surface and a lower surface of the second macaroni layer are surrounded by the first macaroni layer.